On MEMS Reliability and Failure Mechanisms
نویسندگان
چکیده
منابع مشابه
MEMS reliability from a failure mechanisms perspective
Over the last few years, considerable effort has gone into the study of the failure mechanisms and reliability of microelectromechanical systems (MEMS). Although still very incomplete, our knowledge of the reliability issues relevant to MEMS is growing. This paper provides an overview of MEMS failure mechanisms that are commonly encountered. It focuses on the reliability issues of micro-scale d...
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Reliability of MEMS (MicroElectroMechanical-Systems) devices is a crucial aspect as it can discriminate the successful from partially or totally missed reaching of Microsystem technology based market products. However, the topic of MEMS reliability is significantly articulated, as it comprises numerous physics of failure and diverse failure mechanisms. Thereafter, it requires a pronounced sensi...
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Widespread acceptance of micro-electro-mechanical systems (MEMS) depends highly on their reliability, both for large-volume commercialization and for critical applications. The problem of multiple dependent failure processes is of particular interest to MEMS researchers. For MEMS devices subjected to both wear degradation and random shocks that are dependent and competing, we propose a new reli...
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ژورنال
عنوان ژورنال: International Journal of Quality, Statistics, and Reliability
سال: 2011
ISSN: 1687-7144,1687-7152
DOI: 10.1155/2011/820243